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Applied Science & Technology Full Text (H.W. Wilson)

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Suppression of Stress-Induced Defects in FinFET by Implantation and STI Co-Optimization.

Subjects: ION implantation; STRAY currents; OXIDE coating

  • Source: IEEE Transactions on Electron Devices. May2021, Vol. 68 Issue 5, p2587-2589. 3p.

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A Novel Nitrogen Ion Implantation Technique for Turning Thin Film "Normally On" AlGaN/GaN Transistor into "Normally Off" Using TCAD Simulation.

Subjects: *ION implantation; *GALLIUM nitride; *THIN films

  • Source: Membranes. Nov2021, Vol. 11 Issue 11, p899-899. 1p.

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  • 1-10 of  1,074 results for ""ION implantation""