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Academic Journal

Molecular beam epitaxy growth of AlGaN quantum wells on 6H-SiC substrates with high internal quantum efficiency.

Subjects: MOLECULAR beam epitaxy; ALUMINUM; HETEROSTRUCTURES

  • Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Mar2012, Vol. 30 Issue 2, p02B119, 5p

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Academic Journal

Molecular beam epitaxy III-nitride growth for polarization sensitive devices based on M-plane films with in situ real time analysis by spectroscopic ellipsometry.

Subjects: NITRIDES; HETEROSTRUCTURES; ELLIPSOMETRY

  • Source: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; May/Jun2008, Vol. 26 Issue 3, p1049-1052, 4p, 6 Graphs

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Structural characterization of epitaxial γ-Ta2N thin films and AlN/γ-Ta2N heterostructures on SiC substrates.

Subjects: THIN films; TANTALUM; MOLECULAR beam epitaxy

  • Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2023, Vol. 41 Issue 4, p1-6, 6p

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  • 1-10 of  85 results for ""ACTIVE nitrogen""