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Academic Journal

Wet and dry etching of ultrawide bandgap LiGa5O8 and LiGaO2.

Subjects: PLASMA etching; VAPOR-plating; EPITAXY

  • Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2024, Vol. 42 Issue 3, p1-9, 9p

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  • 1-10 of  4,462 results for ""ETCHING""