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Academic Journal

Ion implantation, yesterday and today.

Subjects: ION implantation

  • Source: Solid State Technology. May97, Vol. 40 Issue 5, p129. 2p. 3 Diagrams.

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Academic Journal

A new era for high-current, low-energy ion implantation.

Subjects: ION implantation; SEMICONDUCTOR wafers

  • Source: Solid State Technology. Nov2000, Vol. 43 Issue 11, p103. 5p. 1 Color Photograph, 3 Diagrams, 2 Graphs.

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Academic Journal

Formation of ultra-shallow junctions by ion implantation and RTA.

Subjects: ION implantation; RAPID thermal processing; ANNEALING of metals

  • Source: Solid State Technology. Dec98, Vol. 41 Issue 12, p43. 5p. 5 Graphs.

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Academic Journal

Japanese companies design multifunction minifab tools.

Subjects: SEMICONDUCTOR wafers; ION implantation

  • Source: Solid State Technology. Jun2001, Vol. 44 Issue 6, p83. 2p. 3 Diagrams.

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Academic Journal

Hot topics at MRS: low-k, dopant profiling, copper.

Subjects: MATERIALS; ION implantation; SCANNING electron microscopy

  • Source: Solid State Technology. Jun2000, Vol. 43 Issue 6, p50. 2p.

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Academic Journal

An improved secondary electron flood helps control ion implant charge.

Subjects: ION implantation; ELECTRONS; SCIENTIFIC experimentation

  • Source: Solid State Technology. Apr2000, Vol. 43 Issue 4, p63. 3p. 1 Color Photograph, 1 Graph.

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Academic Journal

Charge control for high-current ion implant.

Subjects: ION implantation; SEMICONDUCTOR wafers

  • Source: Solid State Technology. Jun97, Vol. 40 Issue 6, p101. 6p. 4 Diagrams, 4 Graphs.

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Academic Journal

Using SIMS to detect contamination sources from ion implanters.

Subjects: ION implantation; SECONDARY ion mass spectrometry

  • Source: Solid State Technology. May95, Vol. 38 Issue 5, p51. 6p. 1 Diagram, 1 Chart, 7 Graphs.

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Academic Journal

Conventional beamline implantation of decaborane.

Subjects: BORON; ION implantation

  • Source: Solid State Technology. Jun2001, Vol. 44 Issue 6, p77. 3p. 2 Graphs.

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Academic Journal

Advances in ion implanter productivity and safety.

Subjects: ION implantation

  • Source: Solid State Technology. Dec96, Vol. 39 Issue 12, p69. 4p. 2 Diagrams, 5 Charts, 4 Graphs.

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  • 1-10 of  700 results for ""ION implantation""