Subjects: *LASER plasmas; *LASER beams
Record details
Subjects: *PLASMA gases; *ABSORPTION spectra; *STERILIZATION (Disinfection)
Subjects: *LASER plasmas
Subjects: ULTRAVIOLET radiation; LIGHT sources; METAL plate processes (Lithography)ORLANDO (Fla.); FLORIDA
Subjects: HIGH power lasers; COATING processes; OPTICAL coatings
Subjects: COATING processes; UNIFORMITY; COMPUTER simulation
Subjects: ELECTRON beam lithography; EXTREME ultraviolet lithography; SEMICONDUCTOR lasersUNITED States
Subjects: SPUTTERING (Physics); EVAPORATION (Chemistry); OPTICAL coatings
Subjects: CHARGE coupled devices; LASERS; SPECTRUM analysis
Subjects: RUBY lasers; SOLID-state lasers; LASERS
