Search Results

RF metrology system for real-time plasma checks.

Subjects: *MEASUREMENT; *EQUIPMENT & suppliesFOURTH State Technology (Company) ; VI Technology Inc.

• Source: Solid State Technology. Dec95, Vol. 38 Issue 12, p38. 1/3p.

Record details

Atmospheric downstream plasma--a new tool for semiconductor...

• Authors : Savastiouk, Sergey; Siniaguine, Oleg; Hammond, Martin L.

Subjects: *PLASMA engineering; *SEMICONDUCTOR design

• Source: Solid State Technology. Jul98, Vol. 41 Issue 7, p133. 3p. 2 Diagrams, 1 Chart.

Record details

2-D concentration maps by planar laser-induced fluorescent imaging.

• Authors : Zachariah, Michael R.; McMillin, Brian K.

Subjects: *FLUORESCENCE; *PLASMA effects in semiconductors

• Source: Solid State Technology. Jun96, Vol. 39 Issue 6, p147. 5p. 4 Color Photographs, 3 Diagrams, 2 Charts.

Record details