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Ozonated water for photoresist removal.

• Authors : Nelson, Steve

Subjects: OZONIZATION; MASS transfer

• Source: Solid State Technology. Jul99, Vol. 42 Issue 7, p107. 4p. 2 Diagrams, 4 Graphs.

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Benefits and challenges of centrifugal spray processor technology.

• Authors : Christenson, Kurt K.

Subjects: *SEMICONDUCTOR industry; *EQUIPMENT & supplies

• Source: Solid State Technology. Dec97, Vol. 40 Issue 12, p55. 7p.

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Modeling the characteristics of gas system dry-down.

• Authors : Dheandhanoo, Seksan; Yang, James H.; Wagner, Michael D.

Subjects: *MATERIALS; *GAS distribution; *SEMICONDUCTOR industry

• Source: Solid State Technology. Jun2001, Vol. 44 Issue 6, p125. 4p. 4 Graphs.

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Factors influencing damascene feature fill using copper PVD and electroplating.

• Authors : Reid, Jan; Mayer, Steve; Broadbent, Eliot

Subjects: *VAPOR-plating; *ELECTROPLATING; *COPPER plating

• Source: Solid State Technology. Jul2000, Vol. 43 Issue 7, p86. 7p. 2 Color Photographs, 1 Black and White Photograph, 3 Diagrams, 2 Graphs.

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Catalytic technology for PFC emissions control.

• Authors : Brown, Roy S.; Rossin, Joseph A.; Aitchison, Kenneth

Subjects: *SEMICONDUCTOR industry; *CATALYSTS; *FLUORINE compounds

• Source: Solid State Technology. Jul2001, Vol. 44 Issue 7, p189. 6p. 5 Graphs.

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post-ash residue removal.

• Authors : Loper, Steve; Ma, Weiping C.; Chang, Luke

Subjects: *POLYMER solutions; *SOLVENTS

• Source: Solid State Technology. Jun2001, Vol. 44 Issue 6, p68. 4p. 2 Black and White Photographs, 1 Diagram, 1 Graph.

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PRODUCT NEWS.

Subjects: *SEMICONDUCTOR industry; *SEMICONDUCTOR wafers; *EQUIPMENT & supplies

• Source: Solid State Technology. Jan2001, Vol. 44 Issue 1, p119. 5p.

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Furnace-based rapid thermal processing.

• Authors : Hebb, Jeffrey

Subjects: *RAPID thermal processing; *SEMICONDUCTOR industry

• Source: Solid State Technology. Oct2000, Vol. 43 Issue 10, p155. 6p. 1 Diagram, 5 Graphs.

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New `green' heat transfer fluids.

• Authors : Tuma, Phillip E.; Tousignant, Lew

Subjects: *FLUOROCARBONS; *SEMICONDUCTOR industry; *HEAT transfer

• Source: Solid State Technology. Jun2000, Vol. 43 Issue 6, p175. 5p. 1 Black and White Photograph, 2 Diagrams, 2 Graphs.

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1999 Roadmap: Solutions and caveats.

Subjects: *CHIEF executive officers; *TECHNOLOGY; *SEMICONDUCTORS

• Source: Solid State Technology. May2000, Vol. 43 Issue 5, p76. 17p. 10 Color Photographs, 3 Graphs.

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