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Publication : solid state technology
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Academic Journal
Cu contamination control for advanced interconnect manufacturing.
Authors :
Dornisch, Dieter
;
Li, Guangming
;
Brongo, Maureen
Subjects:
SEMICONDUCTOR wafers
;
MICROELECTRONICS
;
SEMICONDUCTORS
Source:
Solid State Technology. May2000, Vol. 43 Issue 5, p137. 6p. 1 Color Photograph, 1 Diagram, 2 Graphs.
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