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Periodical

Laser-produced-plasma sources shine brighter.

Subjects: *LASER plasmas; *LASER beams

  • Source: Laser Focus World. Apr2003, Vol. 39 Issue 4, p34. 3p.

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Academic Journal

A comparison of HDP sources for polysilicon etching.

Subjects: *PLASMA etching

  • Source: Solid State Technology. Aug96, Vol. 39 Issue 8, p63. 5p. 2 Color Photographs, 3 Diagrams, 2 Charts.

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Academic Journal

Closed-loop bias voltage control for plasma etching.

Subjects: *PLASMA etching; *VOLTAGE regulators

  • Source: Solid State Technology. Feb2000, Vol. 43 Issue 2, p59. 6p. 1 Diagram, 7 Graphs.

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Academic Journal

The evolution of photoresist and residue removal.

Subjects: *SEMICONDUCTOR wafers; *CLEANING

  • Source: Solid State Technology. May97, Vol. 40 Issue 5, p172. 1p. 1 Graph.

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Periodical

Gas-jet target generates debris-free plasma.

Subjects: *LASER plasmas

  • Source: Laser Focus World. Nov96, Vol. 32 Issue 11, p18. 2p. 1 Diagram.

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Periodical

RF transistor handles 1.5kW.

Subjects: NXP Semiconductors NV

  • Source: Electronics Weekly. 9/14/2016, Issue 2679, p9-9. 1/8p.

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