A BETTER WAY TO PRODUCE thin-film prototypes.

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  • Additional Information
    • Subject Terms:
      CHEMICAL vapor deposition; THIN films; METALLIC oxides
    • Abstract:
      Focuses on a chemical vapor deposition system used in creating thin-film circuits and other devices. Basics of the system; Medical applications using low-temperature polymer vapor-phase coating; Metal-oxide films for thermal and erosion barriers. INSET: Glossary of thin-film terms.