System-Level Applications Make MEMS Ubiquitous.

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  • Author(s): ALLAN, ROGER
  • Source:
    Electronic Design. 1/12/2012, Vol. 60 Issue 1, p61-64. 4p. 4 Color Photographs, 1 Diagram.
  • Additional Information
    • Subject Terms:
      TECHNOLOGY; MICROELECTROMECHANICAL systems; ACTUATORS; ACCELEROMETERS; DETECTORS
    • Abstract:
      The article reports that a system-level approach is exciting the technology of microelectromechanical system (MEMS) devices, which involves the integration of MEMS-based sensors, actuators and structures with functions, like processing and packaging. It mentions that MEMS accelerometers, gyroscopes and inertial management units (IMUs) are becoming smaller and sophisticated with better performance.