Influence of Etching Modes on the Morphology and Composition of the Surface of Multilayer Porous Silicon.

Based on X-ray reflectometry and ultrasoft X-ray spectroscopy data, the opportunity of controlling surface porosity using multi-stage electrochemical etching modes is presented. It is presented how, with an increase in the porosity index of the near-surface layer, the morphology changes and the degree of oxidation of multilayer porous silicon samples increases. [ABSTRACT FROM AUTHOR]

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