Fabrication of ridge waveguide on the ion-implanted TGG crystal by femtosecond laser ablation.

LASER ablation; SOLID-state lasers; ION implantation; FEMTOSECOND lasers; OPTICAL properties; PLANAR waveguides; CRYSTAL surfaces

The ridge waveguide on the TGG crystal has been fabricated through the combination of the ion implantation and the femtosecond laser ablation. Firstly, optical planar waveguide was formed on the top surface of TGG crystal by ion implantation. To investigate the damage induced by the 6.0 MeV Si ion implantation at a dose of 2.0 × 1015 ions/cm2, the vacancy distribution was obtained by the SRIM simulation programme. Subsequently, the ridge waveguide with a width of 20 µm was produced by femtosecond laser ablation. The optical guiding properties of the ridge TGG waveguide were measured at the near-infrared wavelength (976 nm) by the end-face coupling technique. The work demonstrated that the manufactured waveguide structure possesses the ability to confine the light into guided mode, making it potentially valuable in integrated devices. [ABSTRACT FROM AUTHOR]

Copyright of Journal of Modern Optics is the property of Taylor & Francis Ltd and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)