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The Study of Fe83Ga17 Films act as Magnetostrictive Actuator on PZT Substrate.
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- Author(s): Shi, Jiaxing; Zhu, Jie; Yin, Liping; Jiang, Hui; Lu, Cifu; Gao, Xuexu; Bao, Xiaoqian; Li, Jiheng
- Source:
IEEE Transactions on Magnetics; Nov2017, Vol. 53 Issue 11, p1-4, 4p
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- Abstract:
The properties of Fe–Ga thin films on PZT substrate were investigated in this paper. In the Fe–Ga/PZT (ME) devices the Fe–Ga magnetostrictive films act as a driver, therefore it should exhibit a good magnetic and mechanical properties. During sputtering, Ar pressure was changed and Fe–Ga thin films were obtained. It is shown that there is a strong relationship between the gas pressure and film adherence, conductivity, magnetic, and mechanical properties of Fe–Ga thin films. We found that the Fe–Ga/PZT devices with high Young’s modulus and high permittivity also performance good in the ME coupling test. The ME coefficient was 0.17 V/cm Oe at resonance frequency, although the thickness of Fe–Ga film only was about 300 nm. [ABSTRACT FROM AUTHOR]
- Abstract:
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