Miniaturization of mass spectrometer-based leak detection technology–Technical note

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    • Abstract:
      Innovative pumping technology combining both, small-sized scroll- and turbomolecular pumps results in a substantial miniaturization of mass spectrometer-based leak-detector-systems, namely reduction of the outer dimensions to less than 30×30×15 cm and weight to less than 8 kg. To date this technique utilizes the Paul trap principle for leak detection with a sensitivity down to below 10−10 mbar l s−1. [Copyright &y& Elsevier]
    • Abstract:
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